President and CEO
Richard Comunale formed COSM in October 2011 to address the need for engineering and R&D for process systems in the semiconductor manufacturing equipment industry. Prior to forming COSM, Mr. Comunale was VP of Engineering for Carl Zeiss SMT (Semiconductor Manufacturing Technology) in Peabody, MA. As VP of Engineering at venture funded ALIS Corporation, he led the team that developed the world’s first Helium Ion microscope which achieved a measured helium beam spot size of 0.3nm. Mr. Comunale has over 40 years of continuous experience in developing high vacuum-based electron beam, focused ion beam, and CVD process equipment for the semiconductor industry. Mr. Comunale received a BS degree from The University of Southern California
Dir. Mechanical Engineering
Mrs. Barriss has over 30 years experience designing and developing systems for semiconductor manufacturing including being a key member of the team developing the world’s first Helium Ion Microscope, Mrs. Barriss earned a BS in Mechanical Engineering from University of Massachusetts, Lowell.
Dr. Nicholas Economou
Chairman of the Board
Dr. Economou is the former President of Carl Zeiss SMT, Inc., the North American operation of Carl Zeiss SMT AG, which develops and manufactures ultra-resolution microscopes for the semiconductor, materials-science, nanotechnology and life-sciences industries. He was co-founder of the venture capital funded start-up ALIS Corporation, which developed the helium ion microscope and was acquired by Zeiss in July 2006. Dr. Economou began his professional career as a researcher at Bell Laboratories and MIT Lincoln Laboratory. In 1984, he became involved in his first start-up company, Micrion Corporation, which was the first to develop commercial systems utilizing gallium focused ion beam technology. Over the last 30 years, he has served as Chief Executive Officer for several successful technology ventures in the semiconductor and telecommunications industries. He also serves as a director on the boards of a number of technology companies. Dr. Economou received his B.A. in physics from Dartmouth College and his M.A. and Ph.D. in physics from Harvard University. He is a Fellow of the IEEE
Dir. Software Engineering
Mr. Ivory has over 30 years’ experience in the semiconductor capital equipment industry including control software for the first Gallium Focused Ion Beam system for Mask Repair and Circuit Edit applications. He was also the president and founder of Tower Concepts, a software company specializing in configuration management software. Mr. Ivory will be responsible for the software tasks associated with concepts for dimensional beam control and imaging for our equipment. Mr. Ivory earned a BS in Computer & Systems Engineering from Rensselaer Polytechnic Institute.
Dr. Raymond Hill
Staff Scientist / CTO
Dr. Hill has over 40 years of experience designing, building, and testing focused ion beam and electron beam tools, primarily focusing on the optics and source technologies. Dr. Hill also has considerable experience in the areas of high voltage power supplies and detector technologies, as they apply to focused beam tools. He has been a key member of numerous teams, developing tools for the semiconductor industry and also the development of the world’s first Helium Ion Microscope and the first environmental scanning electron microscope. Dr. Hill provides technical guidance for product conception and development. Dr. Hill earned a PhD in Engineering from the University of Cambridge, UK.